Micromesure is a modular non contact measurement station dedicated to high-resolution 3D micropotopography and the analysis of shapes and textures.
It makes it possible to measure profiles or surfaces of objects, as well as thicknesses of transparent materials
The station included :
A MICROSTEP unit, consisting of 3 motor axes X, Y, and Z, one or more CHR sensors equipped with different measuring tools, one or more video cameras and optionally a system for automatically changing measurement tools.
A control unit comprising a PC computer equipped with several specific cards
A data acquisition software "SurfaceMap"(developed by STIL) which allows to control the station via a man-machine interface.
A Post-processing software SPIP TM (developed by Image Metrology) - optional
SURFACE CONDITION
THICKNESS
DISTANCE
ROUGHNESS
MOVEMENT
Advantages :
MPLS, CCS and CHR sensors integration
All materials accept
No sample preparation
Systeme fully automated
Modular architecture
Auto - Selecting Sensor
Hight accuracy and straightness
The MICROMESURE 2 system, equipped with CCS-Prima, Optima +, STIL-DUO or SPS Alpha sensors, is the ideal tool for non-contact surface measurement, including 3D roughness, shape metrology and 3D microtopography.
The MICROMESURE 2 system fully exploits the extraordinary performance of STIL's non-contact sensors in various applications and domains.
Supplied with acquisition control equipment and necessary software, the MICROMESURE 2 system is a "turnkey" system with a device that is immediately operational after installation.
Advantages :
Due to Confocal Chromatic sensors
Non contact dimensional measurement
Nanometric and Micrometric resolutions
White light sensor (no speckle, wide measuring range)
Coaxial measurement (no shadowing)
High local slopes on specular (reflective) surfaces
Insensitive to ambient light
Can measure on metal, glass, semi-conductor, ceramics and more
Thickness & form Measurement of transparent objects
Wide measuring ranges capabilities (from 20 µm to 24 mm)
Due to high quality scanning system
Encoder 0,1 µm on Z axis (series product)
Encoder 0,1 µm on X & Y axis (optional)
Low vibration
Orthgonality and flatness corrections
Transparent housing for avoiding air-turbulences
MICROMESURE 2 with the line Sensor MPLS180-DM
3 Optical heads available: NanoView, MicroView and DeepView
MPLS180 's Very high flow, The duration of the measurement of large areas is reduced from several hours to a few minutes (or seconds!)
Comprising a dedicated software: LineSensorMap
Axes : X & Y
Axes : Y
Configuration
3M - 1R
3M - 3R
3M-1R & 3M-3R
Courses
100 mm
100mm
50 mm
Encoder
No
Yes
Yes
Position accuracy
10µm / 1 mm
1µm / 100mm
1µm / 100mm
Position resolution
0.1µm
0.1µm
0.1µm
Roughtness
1µm / 1 mm
1µm / 100mm
1µm / 100mm
max Speed
20mm / s
20mm / s
5mm / s
Application types :
Analysis of shape and texture
End of Mechanical Inspection
Surface Characterization
The 3D altitude and the topography / thickness / profilometer
Roughtness measurement
Dimentionnal Metrology
Fields of application :
Mechanics (roughness, tribology, 3D metrology, corrosion analysis...)
Glass industry (float glass on line thickness control, 3D metrology...)
Microelectronics (roughness, 3D metrology, defects analysis...)
Optics (roughness, 3D metrology...)
Horlogy (flatness, roughness, thickness...)
Nuclear fuel industry (roughness, tribology, 3D metrology, corrosion analysis...)
Aeronautics (roughness, turbine shape)
Options :
Post-processing software: SPIP from Image Technology
Linear encoders on X & Y axes for real 3D metrology ( position accuracy = 1 µm / 100 mm ))
Video Camera
Simple turret or double turret for changing the optical pens
Vibration-damping stand
1-axis and 2-axes configurations (1)
X & Y travel up to 300 mm (2)
Z travel up to 100 mm (2)
Metrology artifacts
Calibrated groove (depth = 10 µm))
Roughness standard (Ra = 0,8 µm)
Optical flat (diameter = 140 mm)
Offset reticle (for setting video camera offset)
Software for Micromesure 2
Control and acquisition Software Surface Map by STIL
