MICROMESURE STATION 3D

STIL Micromesure station

Micromesure is a modular non contact measurement station dedicated to high-resolution 3D micropotopography and the analysis of shapes and textures.

It makes it possible to measure profiles or surfaces of objects, as well as thicknesses of transparent materials

The station included :

A MICROSTEP unit, consisting of 3 motor axes X, Y, and Z, one or more CHR sensors equipped with different measuring tools, one or more video cameras and optionally a system for automatically changing measurement tools.

A control unit comprising a PC computer equipped with several specific cards

A data acquisition software "SurfaceMap"(developed by STIL) which allows to control the station via a man-machine interface.

A Post-processing software SPIP TM (developed by Image Metrology) - optional

SURFACE CONDITION

THICKNESS

DISTANCE

ROUGHNESS

MOVEMENT

Advantages :

The MICROMESURE 2 system, equipped with CCS-Prima, Optima +, STIL-DUO or SPS Alpha sensors, is the ideal tool for non-contact surface measurement, including 3D roughness, shape metrology and 3D microtopography.

The MICROMESURE 2 system fully exploits the extraordinary performance of STIL's non-contact sensors in various applications and domains.

Supplied with acquisition control equipment and necessary software, the MICROMESURE 2 system is a "turnkey" system with a device that is immediately operational after installation.

Advantages :

Due to Confocal Chromatic sensors

  • Non contact dimensional measurement
  • Nanometric and Micrometric resolutions
  • White light sensor (no speckle, wide measuring range)
  • Coaxial measurement (no shadowing)
  • High local slopes on specular (reflective) surfaces
  • Insensitive to ambient light
  • Can measure on metal, glass, semi-conductor, ceramics and more
  • Thickness & form Measurement of transparent objects
  • Wide measuring ranges capabilities (from 20 µm to 24 mm)

Due to high quality scanning system

  • Encoder 0,1 µm on Z axis (series product)
  • Encoder 0,1 µm on X & Y axis (optional)
  • Low vibration
  • Orthgonality and flatness corrections
  • Transparent housing for avoiding air-turbulences

MICROMESURE 2 with the line Sensor MPLS180-DM

Axes : X & Y Axes : Y

Configuration

3M - 1R3M - 3R3M-1R & 3M-3R

Courses

100 mm100mm50 mm

Encoder

NoYesYes

Position accuracy

10µm / 1 mm1µm / 100mm1µm / 100mm

Position resolution

0.1µm0.1µm0.1µm

Roughtness

1µm / 1 mm1µm / 100mm1µm / 100mm

max Speed

20mm / s20mm / s5mm / s

Application types :

  • Analysis of shape and texture
  • End of Mechanical Inspection
  • Surface Characterization
  • The 3D altitude and the topography / thickness / profilometer
  • Roughtness measurement
  • Dimentionnal Metrology

Fields of application :

  • Mechanics (roughness, tribology, 3D metrology, corrosion analysis...)
  • Glass industry (float glass on line thickness control, 3D metrology...)
  • Microelectronics (roughness, 3D metrology, defects analysis...)
  • Optics (roughness, 3D metrology...)
  • Horlogy (flatness, roughness, thickness...)
  • Nuclear fuel industry (roughness, tribology, 3D metrology, corrosion analysis...)
  • Aeronautics (roughness, turbine shape)

Options :

  • Post-processing software: SPIP from Image Technology
  • Linear encoders on X & Y axes for real 3D metrology ( position accuracy = 1 µm / 100 mm ))
  • Video Camera
  • Simple turret or double turret for changing the optical pens
  • Vibration-damping stand
  • 1-axis and 2-axes configurations (1)
  • X & Y travel up to 300 mm (2)
  • Z travel up to 100 mm (2)

Metrology artifacts

  • Calibrated groove (depth = 10 µm))
  • Roughness standard (Ra = 0,8 µm)
  • Optical flat (diameter = 140 mm)
  • Offset reticle (for setting video camera offset)

Software for Micromesure 2

Control and acquisition Software Surface Map by STIL

Logiciel de contrôle & d'acquisition Surface Map
Fonctions principales
Type of acquisitionProfile scanning (x, y, oblique)
Surface scanning
Point series acquisition
Repetitive measurements
Multi acquisition sequence
Video image (if camera option)
Scanning parameters settingDimensions
Step along each axis
Sensor parameters settingAltitude Mode
Thickness mode
Optical pen choice
Averaging
Double frequency (if available)
Scanning typeConstant speed (with backlash compensation)
Step by step
Z following
Data savingFolder selection
Format selection (binary, csv)
User's supervisionMeasurement progress
X, Y & Z coordinates
Sensor status
Automatic proceduresHardware homing
Leveling
Autofocus
Recentering
Preview

Post Processing Software SPIP by Image Technology

SPIP Post processing
Mains fonctions
4 Modules
Version
8 Modules
Version
Basic modulePlane correction / flatteningYesYes
Cross section & profilingYesYes
Altitude histogramYesYes
Fournier transformYesYes
Correlation functionsYesYes
Image substration & additionYesYes
Color codingYesYes
ZoomYesYes
Transformation: mirrors, rotationsYesYes
Plug-in InterfaceYesYes
Copy, print & save functionsYesYes
Roughness analysis (ISO 25178 + ANSI B46.1)YesYes
3D visualization studioYesYes
Filter moduleYesYes
Extended fournier analysisYes
Grain analysisYes
Batch processingYes
ImageMet explorerYes

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Domaine Saint Hilaire, 595 Rue Pierre Berthier, 13080 Aix-en-Provence - +33 (0)4 42 39 66 51

Domaine Saint Hilaire

595 Rue Pierre Berthier

13080 Aix-en-Provence

+33 (0)4 42 39 66 51

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